Comment Re:Summary misses the coolest details (Score 1) 33
"Laser light at that wavelength has only recently become possible."
Lolwut? We've been able to run multiple frequency-doubling passes on various laser sources to reach most any range of UV laser for well over a decade. The problem is you get not a whole lot of radiant output - less than half a watt output at gobs of watts input.
Also, 148nm is not deep UV, that is flat-out Vacuum UV.