ICE actually has a ways to go. Some historical US deportations (and remember the population was smaller then):
1930s (Great Depression): A period of mass "repatriations" saw an estimated 1.8 million people of Mexican descent—including many U.S. citizens—rounded up and deported or pressured to leave voluntarily. These were often informal raids and not all were official deportations.
1954: Operation Wetback resulted in the expulsion of hundreds of thousands of individuals, though historians estimate the number was closer to 300,000.