See this excellent essay against Mars and in favor of exploring the asteroids, Phobos, Deimos, or Earth's moon by NSS Board of Governors member and former L5 board adviser Eric Drexler, Space Development: The Case Against Mars

This recent NewScientist article overviews a recent report from the NSS co-authored by Buzz Aldrin with a similar conclusion, Astronaut-authored report says NASA needs new direction

The two key technologies are a more advanced form of "source mask optimization" (SMO) than has been used to date, and "ability to program the lithography illumination source at the grayscale pixel level". A very readable account is here: http://www.semiconductor.net/article/CA6597205.html More detailed information on current and older SMO techniques can be found at these links: http://www.luminescent.com/pdf/PMJ08_079_Minimize_MEEF_in_Low_K1_Lithography.pdf http://wps2a.semi.org/cms/groups/public/documents/membersonly/van_schoot_presentation.pdf