Good book for both CMOS and bipolar device physics (Score 4, Informative)

A good book that covers device modeling and design for both CMOS and bipolar VLSI devices is "Fundamentals of Modern VLSI Devices" by Yuan Tar and Tak Ning. It doesn't cover fabrication much but it does a great job of introducing the various electrical effects that modern process integration engineers have to deal with. For a more process-oriented approach there is always Andy Grove's book "Physics and Technology of Semiconductor Devices."