You need single isotope silicon. Silicon-28 seems best. That will reduce the number of defects, thus increasing the chip size you can use, thus eliminating chip-to-chip communication, which is always a bugbear. That gives you effective performance increase.
You need better interconnects. Copper is way down on the list of conducting metals for conductivity. Gold and silver are definitely to be preferred. The quantities are insignificant, so price isn't an issue. Gold is already used to connect the chip to outlying pins, so metal softness isn't an issue either. Silver is trickier, but probably solvable.
People still talk about silicon-on-insulator and stressed silicon as new techniques. After ten bloody years? Get the F on with it! These are the people who are breaking Moore's Law, not physics. Drop 'em in the ocean for a Shark Week special or something. Whatever it takes to get people to do some work!
SoI, since insulators don't conduct heat either, can be made back-to-back, with interconnects running through the insulator. This would give you the ability to shorten distances to compute elements and thus effectively increase density.
More can be done off-cpu. There are plenty of OS functions that can b e shifted to silicon, but where the specialist chips have barely changed in years, if not decades. If you halve the number of transistors required on the CPU for a given task, you have doubled the effective number of transistors from the perspective of the old approach.
Finally, if we dump the cpu-centric view of computers that became obsolete the day the 8087 arrived (if not before), we can restructure the entire PC architecture to something rational. That will redistribute demand for capacity, to the point where we can actually beat Moore's Law on aggregate for maybe another 20 years.
By then, hemp capacitors and remsistors will be more widely available.
(Heat is only a problem for those still running computers above zero Celsius.)