Comment Free electron lasers as EUV source (Score 1) 32
Average power is low now, but there is a clear path to at least kilowatt average powers (see the LBNL NGLS) and 10s of KW are pretty straightforward.
A clear path to kilowatt powers, that's sounds a bit like the stories about the EUV sources years ago. Reality turned out to be quite a bit harder...
There has been quite a bit of work on EUV / Xray optics, but again the parts are really expensive (an X-ray mirror runs $1M. )
Are those normal incidence or grazing incidence mirrors? For proper imaging, you need to image one area onto another area with low aberrations, not one focal point onto another focal point. This is far easier to do with mirrors designed for normal incidence than for grazing incidence. Even then, it turns out that you need about 10 reflections from the EUV source to the silicon wafers; it's because with every reflection you lose about 1/3 of the power that we would like to have a kilowatt to start with. If the reflection losses are a bit larger due to a larger number of mirrors or a higher per-mirror loss, then you need to start with even more power.