szotz writes: You've got falling droplets of molten tin, bright lasers, and fancy evacuated optics. What's not to love about EUV light sources? The fact that we still don't have them in production lines producing chips. Light source maker ASML says it's "more confident" that the technology's on track now, and that the machines should meet their target brightness by 2015, in time to help pattern the 10nm generation of chips — the next next generation. We'll see. Or then again maybe we won't. The light's outside the visible range.