The price has nothing to do with the lack of leverage for the fab. In semiconductors, there has been a massive consolidation of vendors as tools become more and more specialized (and thus far more expensive to design).
For example if you want to buy an immersion ArF lithography tool, you have exactly two vendors to choose from. Both 1 2 of these vendors will charge you tens of millions of dollars for a single tool, and both will make no promises about software upgrades, unless you pay for a service contract.
At the next generation if you want to buy an EUV lithography tool, you have exactly one vendor, with a nice long waiting list (of your competitors) to get a tool. So good luck trying to negotiate on the software patches for the PC attached to it. Also the last quote I heard about for one of these tools was actually over 100 Million USD.