Feed Science Daily: Lighter Gas Reduces Damage To Optics In Extreme Ultraviolet Lithography (sciencedaily.com)
Researchers have discovered a way to generate light and reduce damage in a leading candidate for next-generation microelectronics lithography. The technique could help pack more power into smaller computer chips. In the quest for creating computer chips with ever-smaller feature sizes, chip manufacturers are exploring extreme ultraviolet lithography as the next chip-printing technology.